Agenda

This tutorial provides the foundation material for understanding electrostatics and ESD, and the role in the manufacturing and handling of ESD sensitive devices. The fundamental properties of charge, electric fields, voltage, capacitance, and current are discussed to understand key electrostatic phenomena and electrical processes. These include charge generation and decay, material properties, and induction. An overview of device failure mechanisms is presented, including how these models impact ESD control programs. Finally, the course provides an overview of ESD control procedures during handling and manufacturing and an overview of ANSI/ESD S20.20 program requirements. This full-day course is required for those in-plant auditors and program managers working toward professional ESD certification. The presentation includes many in-class demonstrations, videos, and animated slides.
Some sample topics covered in this course are:
•    Definitions and relationships among important electrical and mechanical properties
•    Causes of charge generation and decay
•    Field effects and voltages
•    Role of capacitance in ESD (Q=CV)
•    Overview of key measurements including common pitfalls of some measurements
•    Review of ESD failure models
•    Understanding and demonstrating electrostatic induction
•    Utility and limitations of air ionization
•    Basic goals of ESD controls
•    Properties of effective ESD control products and materials
•    Overview of ANSI/ESD S20.20 ESD program development requirements

Compliance verification is one of the most important ESD program management elements, and many technical and administrative pitfalls can be avoided. The attendee will learn how to make valid auditing measurements per ESD TR53 – Compliance Verification of ESD Protective Equipment and Materials and how to recognize and avoid common pitfalls. Common instruments will be explained, and the invalid test results that can result when used incorrectly. Advanced auditing techniques will also be covered that enable Class 0 devices to be handled successfully. There are many ways to administer effective compliance verification programs. Two successful examples will be presented that were developed independently by different companies. Hidden administrative pitfalls that often result in poor compliance will also be discussed. This tutorial will be highly interactive with live demonstrations, in-plant photographs, and compelling video clips. Students will be encouraged to ask questions and to participate in the discussions.

In the past years interest in Contact CDM (CCDM) has grown drastically, not the least due to the booming application of chiplets for 3D-IC, requiring accurate CDM assessment in the range well below 100 V. While various types of CCDM methods, like CC-TLP and LICCDM, have been explored already for many years and utilized for characterization purposes, no overall standardization exists yet. In view of the ongoing 3D-IC and other developments, standardization becomes urgent, prescribing in detail the test method to assess IP and product CDM robustness in the lower CDM range and, ideally, providing a formal classification.

It appears a challenge to come to a standard and one reason might be that consensus on exact target and boundary conditions for the CCDM standard is still lacking. Some potential controversies we want to discuss in this workshop:

• Should CCDM target an optimal correlation with regular (FI)CDM, e.g. regarding pulse shape and failure level?
• Should CCDM instead try to resemble e.g. regarding risetime the real-life threats of the target application (handling bare die, chiplets)?
• Are the real-life threats (voltage/peak current) sufficiently known to understand what we need to test for?
• What actions are needed to find the correlation between CCDM peak current, CDM voltage and actual discharges in the field?
• CC-TLP vs. LICCDM: Standardization requires a choice.

Please join us and contribute with your insights to outline the next steps toward a CCDM standard!

This workshop will focus on the use of air ionization used to control static charge in both electrostatic discharge (ESD) and electrostatic attraction (ESA) control programs. Technical experts will lead discussion on metrology challenges, upcoming changes to ESDA standards, and user-based applications of air ionization systems.  Attendees will rotate through each of the different workstations to interact and input on the various topics.